R32 Difluoromethane Raws li Qhuav Etching Gas Rau Si3N4

R32 Difluoromethane kuj hu ua HFC-32, molecular mis: CH2F2, raws li anisotropic etching gas rau Si3N4, nws muaj ib tug kuj tsawg selectivity rau SiO2 thiab Si. Ntxiv rau qhov tseem ceeb etchant, nws tseem tuaj yeem siv los ua cov pa roj rau lwm cov etchants tseem ceeb los kho cov fluorine / carbon piv.

 

R32 - Cov yam ntxwv tseem ceeb:

1.Non-ozone depleting

2. Tsis muaj tshuaj lom

3.Hydrofluorocarbon (HFC) roj

4.Oil: POE (Poly Olester Roj)

Nyob rau hauv niaj hnub era ntawm semiconductor manufacturing, qhov precision thiab miniaturization yog qhov tseem ceeb, cov txheej txheem etching plays lub luag haujlwm tseem ceeb. Etching yog cov txheej txheem nyuaj siv los xaiv tshem tawm cov khaubncaws sab nraud povtseg ntawm cov khoom siv hluav taws xob semiconductor wafers, uas ua rau muaj kev tsim cov qauv hauv Circuit Court complex.

Qhuav etching yog siv roj los etch qhov nruab nrab. Cov txheej txheem qhuav etching muaj xws li lub cev etching (xws li ion beam etching) thiab tshuaj vapor etching (xws li plasma etching). Cov roj siv los cuam tshuam rau qhov chaw ntawm lub substrate rau khawb, thiab nws cov yam ntxwv yog kev ua haujlwm siab.

R32 Difluoromethane yog cov roj etching uas nquag siv, dav siv hauv cov txheej txheem plasma etching hauv kev lag luam hluav taws xob. Tsis tas li ntawd, nws kuj yog ib qho coolant nrog xoom ozone depletion muaj peev xwm, thiab yog dav siv nyob rau hauv cov khoom siv tub yees xws li cua txias, tub yees, thiab lub tsheb cua txias. Piv nrog rau cov tub yees ib txwm muaj, R32 roj muaj cov tub yees ntau dua thiab muaj kev cuam tshuam ib puag ncig.

Xiamen Juda yog ib lub tuam txhab ua lag luam ntawm etching gas thiab tub yees kev daws teeb meem hauv Suav teb, muab ntau yam khoom xws li R32, C4F8, SF6, CF4 thiab Refrigerant Gas. Founded hauv 1988 los ntawm ib tug ntawm Tuam Tshoj cov tshuaj raug pioneers, Juhua Group Corporation, Xiamen Juda tau mob siab rau exporting fluorinated chemicals txij thaum 2004. Peb pab neeg tau cog lus rau excellence thiab muab top-notch gas daws kom tau raws li cov kev xav tau ntawm peb cov neeg muas zaub. Peb txaus siab rau peb lub koob npe nrov ntev rau kev ua tau zoo thiab kev ntseeg siab. Nrog Xiamen Juda, koj tuaj yeem ntseeg tau tias koj tau txais qhov zoo tshaj plaws hauv kev lag luam.